The prediction of stiction failures in MEMS
dc.contributor.author | van Spengen, Merlijn | |
dc.contributor.author | Puers, Bob | |
dc.contributor.author | De Wolf, Ingrid | |
dc.date.accessioned | 2021-10-15T07:20:51Z | |
dc.date.available | 2021-10-15T07:20:51Z | |
dc.date.issued | 2003 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8300 | |
dc.source | IIOimport | |
dc.title | The prediction of stiction failures in MEMS | |
dc.type | Journal article | |
dc.contributor.imecauthor | Puers, Bob | |
dc.contributor.imecauthor | De Wolf, Ingrid | |
dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
dc.source.peerreview | no | |
dc.source.beginpage | 167 | |
dc.source.endpage | 172 | |
dc.source.journal | IEEE Trans. Device and Materials Reliability | |
dc.source.issue | 4 | |
dc.source.volume | 3 | |
imec.availability | Published - imec |
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