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High-resolution scanning spreading resistance microscopy of surrounding-gate transistors

dc.contributor.authorAlvarez, D.
dc.contributor.authorSchömann, S.
dc.contributor.authorGoebel, B.
dc.contributor.authorManger, D.
dc.contributor.authorSchlösser, T.
dc.contributor.authorSlesazeck, S.
dc.contributor.authorHartwich, J.
dc.contributor.authorKretz, J.
dc.contributor.authorEyben, Pierre
dc.contributor.authorFouchier, Marc
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-15T12:38:54Z
dc.date.available2021-10-15T12:38:54Z
dc.date.issued2004-01
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8475
dc.sourceIIOimport
dc.titleHigh-resolution scanning spreading resistance microscopy of surrounding-gate transistors
dc.typeJournal article
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.beginpage377
dc.source.endpage380
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue1
dc.source.volume22
imec.availabilityPublished - imec


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