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Fabrication and characterization of full diamond tips for scanning-spreading resistance microscopy

dc.contributor.authorAlvarez, David
dc.contributor.authorFouchier, Marc
dc.contributor.authorKretz, J.
dc.contributor.authorHartwich, J.
dc.contributor.authorSchoemann, S.
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-15T12:38:55Z
dc.date.available2021-10-15T12:38:55Z
dc.date.issued2004-06
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8476
dc.sourceIIOimport
dc.titleFabrication and characterization of full diamond tips for scanning-spreading resistance microscopy
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewyes
dc.source.beginpage910
dc.source.endpage915
dc.source.journalMicroelectronic Engineering
dc.source.volume73-74
imec.availabilityPublished - imec
imec.internalnotespaper from Micro- and Nano- Engineering 2003


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