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Physical characterization of mixed HfAlOx layers by complementary analysis techniques

dc.contributor.authorBender, Hugo
dc.contributor.authorConard, Thierry
dc.contributor.authorRichard, Olivier
dc.contributor.authorBrijs, Bert
dc.contributor.authorPetry, Jasmine
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorDefranoux, C.
dc.contributor.authorBoher, P.
dc.contributor.authorRochat, N.
dc.contributor.authorWyon, C.
dc.contributor.authorMack, P.
dc.contributor.authorWolstenholme, J.
dc.contributor.authorVitchev, E.
dc.contributor.authorHoussiau, L.
dc.contributor.authorPireaux, J-J.
dc.contributor.authorBergmaier, A.
dc.contributor.authorDollinger, G.
dc.date.accessioned2021-10-15T12:42:11Z
dc.date.available2021-10-15T12:42:11Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8559
dc.sourceIIOimport
dc.titlePhysical characterization of mixed HfAlOx layers by complementary analysis techniques
dc.typeJournal article
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage60
dc.source.endpage63
dc.source.journalMaterials Science and Engineering B
dc.source.volume109
imec.availabilityPublished - open access
imec.internalnotesPaper from E-MRS 2003 in Strasbourg, France


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