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Origin and repartition of the oxide fixed charges generated by electrical stress in memory tunnel oxide

dc.contributor.authorBernardini, S.
dc.contributor.authorMasson, P.
dc.contributor.authorHoussa, Michel
dc.contributor.authorLalande, F.
dc.date.accessioned2021-10-15T12:42:44Z
dc.date.available2021-10-15T12:42:44Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8568
dc.sourceIIOimport
dc.titleOrigin and repartition of the oxide fixed charges generated by electrical stress in memory tunnel oxide
dc.typeJournal article
dc.contributor.imecauthorHoussa, Michel
dc.contributor.orcidimecHoussa, Michel::0000-0003-1844-3515
dc.source.peerreviewno
dc.source.beginpage4251
dc.source.endpage4253
dc.source.journalApplied Physics Letters
dc.source.issue21
dc.source.volume84
imec.availabilityPublished - imec


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