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Metal film characterization with qualified spreading resistance

dc.contributor.authorClarysse, Trudo
dc.contributor.authorHoflijk, Ilse
dc.contributor.authorZhang, Wenqi
dc.contributor.authorMaex, Karen
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-15T12:53:51Z
dc.date.available2021-10-15T12:53:51Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8697
dc.sourceIIOimport
dc.titleMetal film characterization with qualified spreading resistance
dc.typeJournal article
dc.contributor.imecauthorHoflijk, Ilse
dc.contributor.imecauthorMaex, Karen
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.beginpage444
dc.source.endpage449
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue1
dc.source.volume22
imec.availabilityPublished - imec


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