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Carrier illumination for characterization of ultrashallow doping profiles

dc.contributor.authorClarysse, Trudo
dc.contributor.authorLindsay, Richard
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorBudiarto, E.
dc.contributor.authorBorden, P.
dc.date.accessioned2021-10-15T12:53:57Z
dc.date.available2021-10-15T12:53:57Z
dc.date.issued2004-02
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8698
dc.sourceIIOimport
dc.titleCarrier illumination for characterization of ultrashallow doping profiles
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.beginpage439
dc.source.endpage443
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue1
dc.source.volume22
imec.availabilityPublished - imec


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