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Characterization of electrically active dopant profiles with the spreading resistance probe

dc.contributor.authorClarysse, Trudo
dc.contributor.authorVanhaeren, Danielle
dc.contributor.authorHoflijk, Ilse
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-15T12:54:04Z
dc.date.available2021-10-15T12:54:04Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8699
dc.sourceIIOimport
dc.titleCharacterization of electrically active dopant profiles with the spreading resistance probe
dc.typeJournal article
dc.contributor.imecauthorVanhaeren, Danielle
dc.contributor.imecauthorHoflijk, Ilse
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecVanhaeren, Danielle::0000-0001-8624-9533
dc.source.peerreviewno
dc.source.beginpage123
dc.source.endpage206
dc.source.journalMaterials Science and Engineering R: Reports
dc.source.issue5_6
dc.source.volume47
imec.availabilityPublished - imec


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