Show simple item record

Line edge roughness and critical dimension variation: Fractal characterization and comparison using model functions

dc.contributor.authorConstantoudis, V.
dc.contributor.authorPatsis, G.P.
dc.contributor.authorLeunissen, Peter
dc.contributor.authorGogolides, E.
dc.date.accessioned2021-10-15T12:56:24Z
dc.date.available2021-10-15T12:56:24Z
dc.date.issued2004-08
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8718
dc.sourceIIOimport
dc.titleLine edge roughness and critical dimension variation: Fractal characterization and comparison using model functions
dc.typeJournal article
dc.source.peerreviewno
dc.source.beginpage1974
dc.source.endpage1981
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue4
dc.source.volume22
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record