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RF MEMS for ubiquitous wireless connectivity. Part 1: Fabrication

dc.contributor.authorDe Los Santos, Hector
dc.contributor.authorFischer, Georg
dc.contributor.authorTilmans, Harrie
dc.contributor.authorvan Beek, Joost T.M.
dc.date.accessioned2021-10-15T13:03:38Z
dc.date.available2021-10-15T13:03:38Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8771
dc.sourceIIOimport
dc.titleRF MEMS for ubiquitous wireless connectivity. Part 1: Fabrication
dc.typeJournal article
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpage36
dc.source.endpage49
dc.source.journalIEEE Microwave Magazine
dc.source.issue4
dc.source.volume5
imec.availabilityPublished - imec


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