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From photon emission microscopy to Raman spectroscopy: failure analysis in microelectronics

dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorRasras, Mahmoud
dc.date.accessioned2021-10-15T13:08:19Z
dc.date.available2021-10-15T13:08:19Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8805
dc.sourceIIOimport
dc.titleFrom photon emission microscopy to Raman spectroscopy: failure analysis in microelectronics
dc.typeJournal article
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.beginpage59
dc.source.endpage65
dc.source.journalEur. Phys. J. Appl. Phys.
dc.source.volume27
imec.availabilityPublished - imec


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