Plasma etching of deep trenches in Si
| dc.contributor.author | Degroote, Bart | |
| dc.date.accessioned | 2021-10-15T13:10:44Z | |
| dc.date.available | 2021-10-15T13:10:44Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8821 | |
| dc.source | IIOimport | |
| dc.title | Plasma etching of deep trenches in Si | |
| dc.type | Journal article | |
| dc.source.peerreview | no | |
| dc.source.beginpage | 63 | |
| dc.source.endpage | 65 | |
| dc.source.journal | Physicalia Magazine | |
| dc.source.volume | 26 | |
| imec.availability | Published - imec |
Files in this item
| Files | Size | Format | View |
|---|---|---|---|
|
There are no files associated with this item. |
|||