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Low-temperature formation of CoSi2 in the presence of Au

dc.contributor.authorDetavernier, C.
dc.contributor.authorLavoie, C.
dc.contributor.authord'Heurle, F.M.
dc.contributor.authorBender, Hugo
dc.contributor.authorVan Meirhaeghe, R.L.
dc.date.accessioned2021-10-15T13:13:13Z
dc.date.available2021-10-15T13:13:13Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8837
dc.sourceIIOimport
dc.titleLow-temperature formation of CoSi2 in the presence of Au
dc.typeJournal article
dc.contributor.imecauthorBender, Hugo
dc.source.peerreviewno
dc.source.beginpage5340
dc.source.endpage5346
dc.source.journalJournal of Applied Physics
dc.source.issue10
dc.source.volume95
imec.availabilityPublished - imec


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