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Corrosion of narrow copper damascene interconnects

dc.contributor.authorErnur, Didem
dc.contributor.authorTerzieva, Valentina
dc.contributor.authorWu, Wen
dc.contributor.authorBrongersma, Sywert
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T13:22:15Z
dc.date.available2021-10-15T13:22:15Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8890
dc.sourceIIOimport
dc.titleCorrosion of narrow copper damascene interconnects
dc.typeJournal article
dc.contributor.imecauthorErnur, Didem
dc.contributor.imecauthorTerzieva, Valentina
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.source.peerreviewno
dc.source.beginpageB636
dc.source.endpageB643
dc.source.journalJournal of the Electrochemical Society
dc.source.issue12
dc.source.volume151
imec.availabilityPublished - imec


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