Scanning spreading resistance microscopy: high resolution two-dimensional carrier profiling of semiconductor structures
dc.contributor.author | Eyben, Pierre | |
dc.date.accessioned | 2021-10-15T13:22:56Z | |
dc.date.available | 2021-10-15T13:22:56Z | |
dc.date.issued | 2004-12 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8894 | |
dc.source | IIOimport | |
dc.title | Scanning spreading resistance microscopy: high resolution two-dimensional carrier profiling of semiconductor structures | |
dc.type | PHD thesis | |
dc.contributor.imecauthor | Eyben, Pierre | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.contributor.thesisadvisor | Vandervorst, Wilfried | |
imec.availability | Published - open access |