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Realization of an optical profiler: introduction to scanning probe microscopy

dc.contributor.authorFriedt, Jean-Michel
dc.date.accessioned2021-10-15T13:29:00Z
dc.date.available2021-10-15T13:29:00Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8929
dc.sourceIIOimport
dc.titleRealization of an optical profiler: introduction to scanning probe microscopy
dc.typeJournal article
dc.source.peerreviewno
dc.source.beginpage1118
dc.source.endpage1125
dc.source.journalAmerican Journal of Physics
dc.source.issue8
dc.source.volume72
imec.availabilityPublished - imec


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