Oxygen-deficiency centers in SiO2 thermally nitrided in NO
dc.contributor.author | Garcia Tello, Pablo | |
dc.contributor.author | Afanasiev, Valeri | |
dc.contributor.author | Stesmans, Andre | |
dc.date.accessioned | 2021-10-15T13:30:52Z | |
dc.date.available | 2021-10-15T13:30:52Z | |
dc.date.issued | 2004 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8938 | |
dc.source | IIOimport | |
dc.title | Oxygen-deficiency centers in SiO2 thermally nitrided in NO | |
dc.type | Journal article | |
dc.contributor.imecauthor | Afanasiev, Valeri | |
dc.contributor.imecauthor | Stesmans, Andre | |
dc.source.peerreview | no | |
dc.source.beginpage | 81 | |
dc.source.endpage | 84 | |
dc.source.journal | Microelectronic Engineering | |
dc.source.issue | 1_4 | |
dc.source.volume | 72 | |
imec.availability | Published - imec | |
imec.internalnotes | Paper from INFOS 2003 |
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