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Metal-gate integration challenges

dc.contributor.authorHenson, Kirklen
dc.contributor.authorJurczak, Gosia
dc.date.accessioned2021-10-15T13:48:26Z
dc.date.available2021-10-15T13:48:26Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9026
dc.sourceIIOimport
dc.titleMetal-gate integration challenges
dc.typeJournal article
dc.contributor.imecauthorJurczak, Gosia
dc.source.peerreviewno
dc.source.beginpage1
dc.source.endpage3
dc.source.journalSemiconductor Fabtech
dc.source.issue15_3
dc.source.volume24
imec.availabilityPublished - imec


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