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Seeing through the haze: process monitoring and qualification using comprehensive surface data

dc.contributor.authorHolsteyns, Frank
dc.contributor.authorRoels, J.
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorKenis, Karine
dc.contributor.authorMertens, Paul
dc.date.accessioned2021-10-15T13:53:26Z
dc.date.available2021-10-15T13:53:26Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9048
dc.sourceIIOimport
dc.titleSeeing through the haze: process monitoring and qualification using comprehensive surface data
dc.typeJournal article
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorKenis, Karine
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.source.peerreviewno
dc.source.beginpage50
dc.source.endpage54
dc.source.journalYield Management Solutions
dc.source.issue1
dc.source.volume6
imec.availabilityPublished - imec


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