Show simple item record

Ion beam synthesis of ternary phase CoFe-silicide in (111)Silicon

dc.contributor.authorTavares, J.
dc.contributor.authorBender, Hugo
dc.contributor.authorWu, Ming Fang
dc.contributor.authorVantomme, Andre
dc.contributor.authorLangouche, G.
dc.contributor.authorLin, Chia-Hui
dc.date.accessioned2021-09-29T13:17:31Z
dc.date.available2021-09-29T13:17:31Z
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/904
dc.sourceIIOimport
dc.titleIon beam synthesis of ternary phase CoFe-silicide in (111)Silicon
dc.typeJournal article
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorVantomme, Andre
dc.source.peerreviewno
dc.source.beginpage986
dc.source.endpage988
dc.source.journalAppl. Phys. Lett.
dc.source.volume67
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record