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The electrical equivalent sidewall damage in patterned low-k dielectrics

dc.contributor.authorIacopi, Francesca
dc.contributor.authorStucchi, Michele
dc.contributor.authorRichard, Olivier
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T14:00:46Z
dc.date.available2021-10-15T14:00:46Z
dc.date.issued2004-02
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9083
dc.sourceIIOimport
dc.titleThe electrical equivalent sidewall damage in patterned low-k dielectrics
dc.typeJournal article
dc.contributor.imecauthorStucchi, Michele
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.source.peerreviewno
dc.source.beginpageG79
dc.source.endpageG82
dc.source.journalElectrochemical and Solid State Letters
dc.source.issue4
dc.source.volume7
imec.availabilityPublished - imec


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