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Use and modeling of MEMS variable capacitors for multi-GHZ radio applications

dc.contributor.authorInnocent, Manuel
dc.date.accessioned2021-10-15T14:01:53Z
dc.date.available2021-10-15T14:01:53Z
dc.date.issued2004-06
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9088
dc.sourceIIOimport
dc.titleUse and modeling of MEMS variable capacitors for multi-GHZ radio applications
dc.typePHD thesis
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorDe Man, Hugo
dc.contributor.thesisadvisorSansen, Willy
imec.availabilityPublished - open access


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