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Experimental and simulation comparison of electron beam proximity correction

dc.contributor.authorLeunissen, Peter
dc.contributor.authorJonckheere, Rik
dc.contributor.authorHofmann, Uli
dc.contributor.authorÜnal, Nezih
dc.contributor.authorKalus, Christian
dc.date.accessioned2021-10-15T14:25:54Z
dc.date.available2021-10-15T14:25:54Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9194
dc.sourceIIOimport
dc.titleExperimental and simulation comparison of electron beam proximity correction
dc.typeJournal article
dc.contributor.imecauthorJonckheere, Rik
dc.contributor.orcidimecJonckheere, Rik::0000-0003-2211-9443
dc.source.peerreviewyes
dc.source.beginpage2943
dc.source.endpage2947
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue6
dc.source.volume22
imec.availabilityPublished - imec


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