Experimental and simulation comparison of electron beam proximity correction
dc.contributor.author | Leunissen, Peter | |
dc.contributor.author | Jonckheere, Rik | |
dc.contributor.author | Hofmann, Uli | |
dc.contributor.author | Ünal, Nezih | |
dc.contributor.author | Kalus, Christian | |
dc.date.accessioned | 2021-10-15T14:25:54Z | |
dc.date.available | 2021-10-15T14:25:54Z | |
dc.date.issued | 2004 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9194 | |
dc.source | IIOimport | |
dc.title | Experimental and simulation comparison of electron beam proximity correction | |
dc.type | Journal article | |
dc.contributor.imecauthor | Jonckheere, Rik | |
dc.contributor.orcidimec | Jonckheere, Rik::0000-0003-2211-9443 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 2943 | |
dc.source.endpage | 2947 | |
dc.source.journal | Journal of Vacuum Science and Technology B | |
dc.source.issue | 6 | |
dc.source.volume | 22 | |
imec.availability | Published - imec |
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