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Line edge roughness: experimental results related to a two-parameter model

dc.contributor.authorLeunissen, Peter
dc.contributor.authorLawrence, W.G.
dc.contributor.authorErcken, Monique
dc.date.accessioned2021-10-15T14:26:07Z
dc.date.available2021-10-15T14:26:07Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9195
dc.sourceIIOimport
dc.titleLine edge roughness: experimental results related to a two-parameter model
dc.typeJournal article
dc.contributor.imecauthorErcken, Monique
dc.source.peerreviewno
dc.source.beginpage25
dc.source.endpage270
dc.source.journalMicroelectronic Engineering
dc.source.volume73-74
imec.availabilityPublished - imec


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