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Leakage mechanism in a porous organic low-k polymer

dc.contributor.authorLi, Yunlong
dc.contributor.authorTokei, Zsolt
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T14:27:42Z
dc.date.available2021-10-15T14:27:42Z
dc.date.issued2004-10
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9202
dc.sourceIIOimport
dc.titleLeakage mechanism in a porous organic low-k polymer
dc.typeJournal article
dc.contributor.imecauthorLi, Yunlong
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecLi, Yunlong::0000-0003-4791-4013
dc.source.peerreviewno
dc.source.beginpage20
dc.source.endpage24
dc.source.journalMicroelectronic Engineering
dc.source.issue1_4
dc.source.volume76
imec.availabilityPublished - imec
imec.internalnotesMaterials for Advanced Metallization; Brussels; March 2004


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