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Plasma sealing of a low-k dielectric polymer

dc.contributor.authorMartin Hoyas, Ana
dc.contributor.authorSchuhmacher, Jorg
dc.contributor.authorWhelan, Caroline
dc.contributor.authorCelis, Jean-Pierre
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T14:45:55Z
dc.date.available2021-10-15T14:45:55Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9274
dc.sourceIIOimport
dc.titlePlasma sealing of a low-k dielectric polymer
dc.typeJournal article
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage32
dc.source.endpage37
dc.source.journalMicroelectronic Engineering
dc.source.issue1_4
dc.source.volume76
imec.availabilityPublished - imec
imec.internalnotesMaterials for Advanced Metallization (MAM) ;March 2004; Brussels


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