Show simple item record

Creep as a reliability problem in MEMS

dc.contributor.authorModlinski, Robert
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorRatchev, Petar
dc.contributor.authorJourdain, Anne
dc.contributor.authorSimons, Veerle
dc.contributor.authorTilmans, Harrie
dc.contributor.authorden Toonder, Jaap M.J.
dc.contributor.authorPuers, Bob
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-15T14:55:16Z
dc.date.available2021-10-15T14:55:16Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9308
dc.sourceIIOimport
dc.titleCreep as a reliability problem in MEMS
dc.typeJournal article
dc.contributor.imecauthorJourdain, Anne
dc.contributor.imecauthorSimons, Veerle
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecSimons, Veerle::0000-0001-5714-955X
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.beginpage1733
dc.source.endpage1738
dc.source.journalMicroelectronics Reliability
dc.source.issue9_11
dc.source.volume44
imec.availabilityPublished - imec
imec.internalnotesSpecial issue 15th ESREF Symposium


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record