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Creep characterization of Al alloy thin films for use in MEMS applications

dc.contributor.authorModlinski, Robert
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorRatchev, Petar
dc.contributor.authorPuers, Robert
dc.contributor.authorden Toonder, Jaap M.J.
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-15T14:55:48Z
dc.date.available2021-10-15T14:55:48Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9310
dc.sourceIIOimport
dc.titleCreep characterization of Al alloy thin films for use in MEMS applications
dc.typeJournal article
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.beginpage272
dc.source.endpage278
dc.source.journalMicroelectronic Engineering
dc.source.issue1_4
dc.source.volume76
imec.availabilityPublished - imec
imec.internalnotesMaterials for Advanced Metallization; Brussels; March 2004


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