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A discussion of the practical importance of positron annihilation lifetime spectroscopy percolation threshold in evaluation of porous low-k dielectrics

dc.contributor.authorMogilnikov, K.P.
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorShamiryan, Denis
dc.contributor.authorPetkov, M.P.
dc.date.accessioned2021-10-15T14:57:28Z
dc.date.available2021-10-15T14:57:28Z
dc.date.issued2004-01
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9317
dc.sourceIIOimport
dc.titleA discussion of the practical importance of positron annihilation lifetime spectroscopy percolation threshold in evaluation of porous low-k dielectrics
dc.typeJournal article
dc.source.peerreviewno
dc.source.beginpage247
dc.source.endpage248
dc.source.journalJapanese Journal of Applied Physics. Part 1: Regular Papers
dc.source.issue1
dc.source.volume43
imec.availabilityPublished - imec


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