Show simple item record

Weibull slope and voltage acceleration of ultra-thin (1.1-1.14 nm EOT) oxynitrides

dc.contributor.authorO'Connor, R.
dc.contributor.authorDegraeve, Robin
dc.contributor.authorKaczer, Ben
dc.contributor.authorVeloso, Anabela
dc.contributor.authorHughes, G.
dc.date.accessioned2021-10-15T15:07:27Z
dc.date.available2021-10-15T15:07:27Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9354
dc.sourceIIOimport
dc.titleWeibull slope and voltage acceleration of ultra-thin (1.1-1.14 nm EOT) oxynitrides
dc.typeJournal article
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.source.peerreviewno
dc.source.beginpage61
dc.source.endpage65
dc.source.journalMicroelectronic Engineering
dc.source.issue1_4
dc.source.volume72
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record