Temperature-accelerated breakdown in ultra-thin SiON dielectrics
dc.contributor.author | O'Connor, Robert | |
dc.contributor.author | Hughes, Greg | |
dc.contributor.author | Degraeve, Robin | |
dc.contributor.author | Kaczer, Ben | |
dc.date.accessioned | 2021-10-15T15:07:42Z | |
dc.date.available | 2021-10-15T15:07:42Z | |
dc.date.issued | 2004 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9355 | |
dc.source | IIOimport | |
dc.title | Temperature-accelerated breakdown in ultra-thin SiON dielectrics | |
dc.type | Journal article | |
dc.contributor.imecauthor | Degraeve, Robin | |
dc.contributor.imecauthor | Kaczer, Ben | |
dc.contributor.orcidimec | Kaczer, Ben::0000-0002-1484-4007 | |
dc.source.peerreview | no | |
dc.source.beginpage | 1254 | |
dc.source.endpage | 1258 | |
dc.source.journal | Semiconductor Science and Technology | |
dc.source.issue | 4 | |
dc.source.volume | 19 | |
imec.availability | Published - imec |
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