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Temperature-accelerated breakdown in ultra-thin SiON dielectrics

dc.contributor.authorO'Connor, Robert
dc.contributor.authorHughes, Greg
dc.contributor.authorDegraeve, Robin
dc.contributor.authorKaczer, Ben
dc.date.accessioned2021-10-15T15:07:42Z
dc.date.available2021-10-15T15:07:42Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9355
dc.sourceIIOimport
dc.titleTemperature-accelerated breakdown in ultra-thin SiON dielectrics
dc.typeJournal article
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorKaczer, Ben
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.source.peerreviewno
dc.source.beginpage1254
dc.source.endpage1258
dc.source.journalSemiconductor Science and Technology
dc.source.issue4
dc.source.volume19
imec.availabilityPublished - imec


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