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The band structure of ALCVD AlZr- and AlHf-oxides as measured by XPS

dc.contributor.authorPetry, Jasmine
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorConard, Thierry
dc.date.accessioned2021-10-15T15:25:34Z
dc.date.available2021-10-15T15:25:34Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9421
dc.sourceIIOimport
dc.titleThe band structure of ALCVD AlZr- and AlHf-oxides as measured by XPS
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorConard, Thierry
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.source.peerreviewno
dc.source.beginpage56
dc.source.endpage59
dc.source.journalMaterials Science and Engineering B
dc.source.issue1_3
dc.source.volume109
imec.availabilityPublished - imec
imec.internalnotesE-MRS 2003 Symp. I: Functional Metal Oxides - Semiconductor Structures


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