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RF-Power: driver for electrostatic RF-MEMS devices

dc.contributor.authorRottenberg, Xavier
dc.contributor.authorBrebels, Steven
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-15T15:55:27Z
dc.date.available2021-10-15T15:55:27Z
dc.date.issued2004-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9530
dc.sourceIIOimport
dc.titleRF-Power: driver for electrostatic RF-MEMS devices
dc.typeJournal article
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorBrebels, Steven
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecBrebels, Steven::0000-0002-1568-0286
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpageS43
dc.source.endpageS48
dc.source.journalJournal of Micromechanics and Microengineering
dc.source.issue9
dc.source.volume14
imec.availabilityPublished - imec
imec.internalnotesSpcial issue 14th Micromechanics Europe Workshop 2003


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