Internal matrix structure of low-k nanoporous silica and its relation to mechanical properties
dc.contributor.author | Saxena, R. | |
dc.contributor.author | Rodriguez, O. | |
dc.contributor.author | Cho, W. | |
dc.contributor.author | Gills, W.N. | |
dc.contributor.author | Plawsky, J.L. | |
dc.contributor.author | Baklanov, Mikhaïl | |
dc.contributor.author | Mogilnikov, K.P. | |
dc.date.accessioned | 2021-10-15T16:02:37Z | |
dc.date.available | 2021-10-15T16:02:37Z | |
dc.date.issued | 2004-12 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9555 | |
dc.source | IIOimport | |
dc.title | Internal matrix structure of low-k nanoporous silica and its relation to mechanical properties | |
dc.type | Journal article | |
dc.source.peerreview | no | |
dc.source.beginpage | 189 | |
dc.source.endpage | 199 | |
dc.source.journal | Journal of Non-Chrystalline Solids | |
dc.source.volume | 349 | |
imec.availability | Published - imec |
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