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Internal matrix structure of low-k nanoporous silica and its relation to mechanical properties

dc.contributor.authorSaxena, R.
dc.contributor.authorRodriguez, O.
dc.contributor.authorCho, W.
dc.contributor.authorGills, W.N.
dc.contributor.authorPlawsky, J.L.
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorMogilnikov, K.P.
dc.date.accessioned2021-10-15T16:02:37Z
dc.date.available2021-10-15T16:02:37Z
dc.date.issued2004-12
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9555
dc.sourceIIOimport
dc.titleInternal matrix structure of low-k nanoporous silica and its relation to mechanical properties
dc.typeJournal article
dc.source.peerreviewno
dc.source.beginpage189
dc.source.endpage199
dc.source.journalJournal of Non-Chrystalline Solids
dc.source.volume349
imec.availabilityPublished - imec


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