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Novel applications of ellipsometry and solvent probes for characterising Cu/low-K dielectric materials for advanced semiconductor interconnects

dc.contributor.authorShamiryan, Denis
dc.date.accessioned2021-10-15T16:11:16Z
dc.date.available2021-10-15T16:11:16Z
dc.date.issued2004-01
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9585
dc.sourceIIOimport
dc.titleNovel applications of ellipsometry and solvent probes for characterising Cu/low-K dielectric materials for advanced semiconductor interconnects
dc.typePHD thesis
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorMaex, Karen
imec.availabilityPublished - open access


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