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Low-k dielectric materials

dc.contributor.authorShamiryan, Denis
dc.contributor.authorAbell, Thomas
dc.contributor.authorIacopi, Francesca
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T16:11:33Z
dc.date.available2021-10-15T16:11:33Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9586
dc.sourceIIOimport
dc.titleLow-k dielectric materials
dc.typeJournal article
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage34
dc.source.endpage39
dc.source.journalMaterials Today
dc.source.issue1
dc.source.volume7
imec.availabilityPublished - imec


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