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The dawn of surface analysis that stands by the side of users - Ultra-thin film analysis by rf-GDOES

dc.contributor.authorShimizu, K.
dc.contributor.authorHabazaki, H.
dc.contributor.authorGijbels, R.
dc.contributor.authorBender, Hugo
dc.date.accessioned2021-10-15T16:11:49Z
dc.date.available2021-10-15T16:11:49Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9587
dc.sourceIIOimport
dc.titleThe dawn of surface analysis that stands by the side of users - Ultra-thin film analysis by rf-GDOES
dc.typeJournal article
dc.contributor.imecauthorBender, Hugo
dc.source.peerreviewno
dc.source.beginpage97
dc.source.endpage101
dc.source.journalEngineering Materials
imec.availabilityPublished - imec
imec.internalnotesin Japanese


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