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On the determination of two-dimensional carrier distributions

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorClarysse, Trudo
dc.contributor.authorDe Wolf, Peter
dc.contributor.authorHellemans, L.
dc.contributor.authorSnauwaert, J.
dc.contributor.authorPrivitera, Vittorio
dc.contributor.authorRaineri, Vito
dc.date.accessioned2021-09-29T13:21:18Z
dc.date.available2021-09-29T13:21:18Z
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/964
dc.sourceIIOimport
dc.titleOn the determination of two-dimensional carrier distributions
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage123
dc.source.endpage32
dc.source.journalNuclear Instruments and Methods in Physics Research B
dc.source.issue1_2
dc.source.volume96
imec.availabilityPublished - open access
imec.internalnotes10th Int. Conf. on Ion Implantation Technology. 13-17 June 1994; Catania, Italy


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