Diffusion limited oxygen precipitation in silicon: precipitate growth kinectics and phase formation
| dc.contributor.author | Vanhellemont, Jan | |
| dc.date.accessioned | 2021-09-29T13:21:43Z | |
| dc.date.available | 2021-09-29T13:21:43Z | |
| dc.date.issued | 1995 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/969 | |
| dc.source | IIOimport | |
| dc.title | Diffusion limited oxygen precipitation in silicon: precipitate growth kinectics and phase formation | |
| dc.type | Journal article | |
| dc.source.peerreview | no | |
| dc.source.beginpage | 4297 | |
| dc.source.endpage | 4299 | |
| dc.source.journal | J. Appl. Phys. | |
| dc.source.issue | 6 | |
| dc.source.volume | 78 | |
| imec.availability | Published - imec |
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