Low-k dielectrics: spin-on or CVD?
dc.contributor.author | Van Bavel, Mieke | |
dc.contributor.author | Iacopi, Francesca | |
dc.contributor.author | Baklanov, Mikhaïl | |
dc.contributor.author | Maex, Karen | |
dc.date.accessioned | 2021-10-15T16:47:54Z | |
dc.date.available | 2021-10-15T16:47:54Z | |
dc.date.issued | 2004 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9706 | |
dc.source | IIOimport | |
dc.title | Low-k dielectrics: spin-on or CVD? | |
dc.type | Journal article | |
dc.contributor.imecauthor | Van Bavel, Mieke | |
dc.contributor.imecauthor | Maex, Karen | |
dc.source.peerreview | no | |
dc.source.beginpage | 95 | |
dc.source.endpage | 98 | |
dc.source.journal | Future Fab | |
dc.source.issue | 17 | |
imec.availability | Published - imec |
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