dc.contributor.author | Van Cauwenberghe, Marc | |
dc.contributor.author | Mannaert, Geert | |
dc.contributor.author | Boullart, Werner | |
dc.contributor.author | Hendrickx, Dirk | |
dc.contributor.author | Schmidt, M.O. | |
dc.date.accessioned | 2021-10-15T16:50:42Z | |
dc.date.available | 2021-10-15T16:50:42Z | |
dc.date.issued | 2004 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9715 | |
dc.source | IIOimport | |
dc.title | Using a biased-ICP reactor for PR strip and Cu barrier removal | |
dc.type | Journal article | |
dc.contributor.imecauthor | Van Cauwenberghe, Marc | |
dc.contributor.imecauthor | Mannaert, Geert | |
dc.contributor.imecauthor | Boullart, Werner | |
dc.contributor.imecauthor | Hendrickx, Dirk | |
dc.contributor.orcidimec | Boullart, Werner::0000-0001-7614-2097 | |
dc.source.peerreview | no | |
dc.source.beginpage | S11 | |
dc.source.endpage | S13 | |
dc.source.journal | Solid State Technology | |
dc.source.issue | 4 | |
dc.source.volume | 47 | |
imec.availability | Published - imec | |