Show simple item record

A life-cycle cost (LCC) fab model - interaction between activities in IC manufacturing and their supporting facilities within a fab

dc.contributor.authorVan Hoornick, Nausikaa
dc.contributor.authorVan den Broeck, Kristel
dc.contributor.authorVan Hoeymissen, Jan
dc.contributor.authorHeyns, Marc
dc.contributor.authorRiedel, Wolfgang
dc.contributor.authorBraun, Christian
dc.date.accessioned2021-10-15T17:05:01Z
dc.date.available2021-10-15T17:05:01Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9761
dc.sourceIIOimport
dc.titleA life-cycle cost (LCC) fab model - interaction between activities in IC manufacturing and their supporting facilities within a fab
dc.typeJournal article
dc.contributor.imecauthorVan Hoornick, Nausikaa
dc.contributor.imecauthorHeyns, Marc
dc.source.peerreviewno
dc.source.beginpage46
dc.source.endpage49
dc.source.journalSemiconductor Fabtech
dc.source.volume23
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record