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MEMS reliability. Stiction, charging, and RF MEMS

dc.contributor.authorvan Spengen, Merlijn
dc.date.accessioned2021-10-15T17:14:13Z
dc.date.available2021-10-15T17:14:13Z
dc.date.issued2004-05
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9791
dc.sourceIIOimport
dc.titleMEMS reliability. Stiction, charging, and RF MEMS
dc.typePHD thesis
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorPuers, Bob
dc.contributor.thesisadvisorMertens, Robert
imec.availabilityPublished - open access


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