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Investigating the role of gas cavitation in megasonic nanoparticle removal

dc.contributor.authorVereecke, Guy
dc.contributor.authorParton, Els
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorXu, K
dc.contributor.authorVos, Rita
dc.contributor.authorMertens, Paul
dc.contributor.authorSchmidt, M.O.
dc.contributor.authorBauer, T.
dc.date.accessioned2021-10-15T17:36:49Z
dc.date.available2021-10-15T17:36:49Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9861
dc.sourceIIOimport
dc.titleInvestigating the role of gas cavitation in megasonic nanoparticle removal
dc.typeJournal article
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorParton, Els
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.source.peerreviewno
dc.source.beginpage57
dc.source.endpage63
dc.source.journalMicro
dc.source.issue1
dc.source.volume22
imec.availabilityPublished - imec


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