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Nano-sized particles: quantification and removal by brush scrubber cleaning

dc.contributor.authorXu, Kaidong
dc.date.accessioned2021-10-15T18:03:09Z
dc.date.available2021-10-15T18:03:09Z
dc.date.issued2004-12
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9942
dc.sourceIIOimport
dc.titleNano-sized particles: quantification and removal by brush scrubber cleaning
dc.typePHD thesis
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorVinckier, Chris
dc.contributor.thesisadvisorMertens, Paul
imec.availabilityPublished - open access


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