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Pore structure of modified cyclic silsesquioxane thin films made porous using a cyclodextrins-based porogen

dc.contributor.authorYim, Jin-Heong
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorGidley, D.W.
dc.contributor.authorPeng, Huagen
dc.contributor.authorJeong, Hyun-Dam
dc.contributor.authorPu, Lyong Sun
dc.date.accessioned2021-10-15T18:10:22Z
dc.date.available2021-10-15T18:10:22Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9963
dc.sourceIIOimport
dc.titlePore structure of modified cyclic silsesquioxane thin films made porous using a cyclodextrins-based porogen
dc.typeJournal article
dc.source.peerreviewno
dc.source.beginpage8953
dc.source.endpage8959
dc.source.journalJournal of Physical Chemistry B
dc.source.issue26
dc.source.volume108
imec.availabilityPublished - imec


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