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Some fundamental aspects of profile etching at InP surfaces

dc.contributor.authorVermeir, I. E.
dc.contributor.authorGomes, W. P.
dc.contributor.authorVan Daele, P.
dc.date.accessioned2021-09-29T13:24:29Z
dc.date.available2021-09-29T13:24:29Z
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/996
dc.sourceIIOimport
dc.titleSome fundamental aspects of profile etching at InP surfaces
dc.typeJournal article
dc.source.peerreviewno
dc.source.beginpage3226
dc.source.endpage3232
dc.source.journalJ. Electrochem. Soc.
dc.source.volume142
imec.availabilityPublished - imec


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