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Browsing by Author "Ablett, J.M."

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    HAXPES study of full high-k/metal gate stacks deposited on Ge substrates

    Fleischmann, Claudia  
    ;
    Kalpyris, Ioannis
    ;
    Conard, Thierry  
    ;
    Adelmann, Christoph  
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    Sioncke, Sonja
    Meeting abstract
    2013, AVS 60th International Symposium & Exhibition, 27/10/2013, p.TuA9
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    Preliminary hard X-ray micro-spectroscopic investigations on thin-film Ta-and-W based diffusion barriers for copper interconnect technology

    Ablett, J.M.
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    Woicik, J.C.
    ;
    Tokei, Zsolt  
    Proceedings paper
    2007, 9th International Conference on Synchrotron Radiation Instrumentation, 28/05/2006, p.1557-1560

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