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Browsing by Author "Adachi, Kanna"

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    Evaluation of the junction delineation accuracy and reproducibility with the SSRM technique

    Eyben, Pierre  
    ;
    Vanhaeren, Danielle  
    ;
    Janssens, Tom
    ;
    Hantschel, Thomas  
    ;
    Vandervorst, Wilfried  
    Journal article
    2007, Microelectronic Engineering, (84) 3, p.437-440

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