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Browsing by Author "Adams, Abdulrazaq"

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    OPC and Modeling Solution towards 0.55NA EUV Stitching

    Xu, Dongbo
    ;
    Gillijns, Werner  
    ;
    Wu, Stewart
    ;
    Adams, Abdulrazaq
    ;
    Wiaux, Vincent  
    ;
    Philipsen, Vicky  
    Proceedings paper
    2024, Optical and EUV Nanolithography XXXVII, 2024-02-25, p.129530K

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